Single Stage, Tied Diaphragm Regulator

Intermediate to High Flow
Ultra-High Purity Applications
Corrosive Gases
Flow Rates: Standard to 600 slpm (21 scfm)

Body: SS 316L Secondary Remelt
Poppet & Diaphragm: Ni-Cr-Mo Alloy/ UNS N06022
Nozzle: SS 316L
Finish: Electropolished and Passivated
Seat: PCTFE
Surface Finish: 10 Ra avg

Source Pressure: Vacuum to 2300 psig (159 bar) inlet
Delivery Pressure: 2 to 100 psig (0.14 to 7 bar)
Proof Pressure: 4000 psig (376 bar)
Burst Pressure: 8000 psig (552 bar)

Inlet/Outlet Connectors: ¼ face seal
Bonnet Port: ⅛ inch NPT
Flow Coefficient: 0.45
Internal Volume: 1.06 in³ (17.4 cm³)
Operating Temperature: -40°F to + 160°F (-40°C to +71°C)
Surface Finish: 10 Ra avg
Inboard Leakage: 2×10^-10 sccs
Outboard Leakage: 2 x 10^-9 sccs He
Leakage Across Seat: 4 x 10^-8 sccs He
Supply Pressure Effect: 1.6 psig per 100 psig source pressure drop

2 Ports
Inlet/Outlet Ports: ¼ inch face seal male