Gas Panels

SEMI-GAS® Gas Panels:
Wall Mount Systems to Safely Deliver Process & Purge Gases with the Highest Level of Control & Performance

Engineered for maximum reliability and safety, SEMI-GAS® gas panels guarantee the quality and performance required in delivering process & purge gases in stringent research and production environments.

Used for the safe, precise handling and delivery of hazardous and inert gases, SEMI-GAS® Decaturion™ source manifolds offer flexibility for mounting on walls or racks, and their modular designs make component upgrades and replacements easy and accessible.

Our Decaturion™ products conform to SEMI S2 and boast ultra high purity orbitally welded construction to meet the stringent performance and regulatory demands of the most advanced applications and high-tech processes.

Download Our eBook

  • The Applied Solutions Process: Applying Engineering Innovation to Create Custom Gas Delivery Solutions
  • Explore our unique process for adapting our proven equipment to your distinct application and regulatory requirements.
  • AES applied innovation ebook

Download Now

Explore our Decaturion™ Wall Mount Systems Offerings

sg-decaturion-at-plus-panel

AT-Plus Wall Mount System

DOWNLOAD SPEC SHEET »

sg-decaturion-2-valve-manual-panel

Two Valve Wall Mount System

DOWNLOAD SPEC SHEET »

sg-decaturion-3-valve-manual-panel

Three Valve Wall Mount System

DOWNLOAD SPEC SHEET »

versa-gas cabinet

 

EQUIPMENT INNOVATION CASE STUDY:

SEMI-GAS® Xturion™ Adaptable Source System for Tier 1 Semiconductor Fab

Discover how AES’ custom Xturion™ system provided the quality and flexibility this leading fab needed to enable its researchers to innovate faster.

Download Case Study

Request More Information or a Quote for SEMI-GAS® Gas Panels

Discover how SEMI-GAS® gas panels can provide reliable, safe, high-quality gas handling capabilities for your unique application – fill out the form below to connect with our engineering team for more information or to start a quote.