Nanoturion™ Distribution Systems
SEMI-GAS®’ line of Nanoturion™ Distribution Systems provides safe and continuous gas distribution from a single source gas supply to multiple points of use.
Featuring an in-line architecture, which is unique to SEMI-GAS®, these distribution systems are engineered in a compact, modular design to reduce the dead space volume compared to other high purity valve manifold configurations.
Each system also utilizes springless diaphragm valves, pressure transducers, and tied diaphragm regulators to maximize purge efficiency and eliminate contamination of the source supply.
This protection, combined with a SEMI S2 compliant design, makes Nantourion™ distribution systems ideal for use in the manufacture of a variety of highly advanced, precision-driven nanotechnology and microelectronics products.
Explore our Nanoturion™ Distribution Systems Offerings
Manual Distribution System
Semi-Automatic Single ESO Distribution System
Semi-Automatic ESO per Stick Distribution System
Fully Automatic Distribution System
Looking to Order?
To order any of our Nanoturion™ Distribution Systems, contact a SEMI-GAS® sales representative today.