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July 31, 2017

Applied Energy Systems Showcases New SEMI-GAS® Nanoturion™ Fully Automatic Valve Manifold Box for Dichlorosilane (DCS)

System Features Multi-Zone Heat Capabilities to Stabilize DCS Flow Rates and Delivery Pressures for Semiconductor Manufacturing Applications

MALVERN, PA, JULY 31, 2017 — Applied Energy Systems (AES), provider of high and ultra high purity gas systems, services, and solutions – including design, manufacturing, testing, installation, and expert field service – is showcasing its SEMI-GAS® Nanoturion™ Valve Manifold Box for Dichlorosilane (DCS) to support semiconductor process equipment manufacturing and related applications. The premier Fully Automatic system includes manifold heat tracing and a standalone wall-mounted heater controller to enable multi-zone heat capabilities for stabilizing the high flow rates and delivery pressures required for vaporizing and delivering DCS. The system’s inlet header and various stick zones are independently controlled to support separate process, tool, or experiment gas supplies.

This specialized Nanoturion™ valve manifold box is equipped with a GigaGuard™ GSM Fully Automatic Controller, which includes a color touchscreen interface for intuitive operator control and the ability to automate sequences for streamlined operations and maintenance. The controller features Ethernet communications, exhaust pressure monitoring, and user-configured set limits, warnings, and alarms.

Additional design highlights of the Nanoturion™ Fully Automatic Valve Manifold Box for DCS include:

  • Ultra high purity 316L SS components orbitally welded and assembled in a Class 100 cleanroom
  • A SEMI S2 certified design and helium leak testing system validation to 1.0 x 10-9 atm-cm3/sec.
  • A fully loaded stick design in an 8-line configuration with 8 process gas sticks populated.
  • Fully automatic purge capability via automated sequences set from the GSM controller.
  • Multiple safety features to support toxic gas delivery requirements, including a UV/IR pyrophoric gas detector, an EMO (emergency off) button for manual shutdown, and optional Z-Purge kit for Class I, Division II applications.

“We realized that given the proliferation of Dichlorosilane as one of the most widely-used specialty gases in semiconductor fabs, a system tailored specifically to DCS handling requirements was needed,” said Jim Murphy, General Manager of Applied Energy Systems. “This Nanoturion Fully Automatic Valve Manifold Box is tailored to uphold the highest standards of safety while also giving operators programmable and independent control to supply DCS to different processes – enabling the flexibility that supports rapid innovation.”

Customers interested in integrating the SEMI-GAS® Nanoturion™ Fully Automatic Valve Manifold Box for Dichlorosilane into their fabrication or experimentation processes can contact AES at for details.


About Applied Energy Systems

Applied Energy Systems (AES) is the premier provider of high and ultra high purity gas systems, services, and solutions. Since 1968, customers have turned to AES for high-value systems engineering – including design, manufacturing, testing, and field services. Whether equipment requirements are driven by regulation, innovation, or both, AES brings together its specialized engineering capabilities and vast scope of product offerings to create the gas delivery solutions that meet business-critical process demands.

With two industry-leading equipment divisions, SEMI-GAS® and VERSA-GAS™, AES addresses high purity and ultra high purity gas delivery needs for a diverse range of rigorous applications, including semiconductors and electronics, pharmaceuticals and biotechnology, photovoltaics, manufacturing, research laboratories, universities and more. For more information, visit

Media Contact:
Megan Kasper
Applied Energy Systems