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November 30, 2015

SEMI-GAS® Introduces Its Xturion™ Adaptable Source System to Enable Flexible Delivery of a Wide Range of Gases within One Custom-Engineered Solution

Gases and Delivery Flow Rates to Meet Changing Application Demands

MALVERN, PA, November 30, 2015 – SEMI-GAS®, the industry-leading line of ultra high purity gas source and distribution systems with robust control technology, has unveiled the Xturion™ Adaptable Source System as the newest offering developed through its Applied Solutions custom-engineering process. The flexibility built into this system gives operators a single solution to deliver a wide range of gases—including hazardous, nonhazardous, compressed and liquefied gases—in typical, high, and low delivery flows as needed to accommodate application demands.

The system’s adaptable design makes it ideal for research & development environments, which often require ongoing process changes and in turn, gas delivery modifications, to achieve experiment objectives. The system includes multiple safety mechanisms to allow such updates to be made securely on site, although operators should be highly qualified and experienced in the handling of hazardous production materials to ensure proper system purging and safe component changes.

To enable its diverse flexibility, the Xturion™ Adaptable Source System features:

  • A process / process / purge / bubbler system configuration in (4) separate and self-contained one cylinder enclosures with dual cylinder restraints, cylinder shelves, and kits to accommodate cylinders less than 6 ½” in diameter. Both process enclosures include 8” exhaust stacks and additional air louvers to accommodate higher flow gas delivery scenarios and comply with the Compressed Gas Association (CGA) G-13 code for use with silane and silane mixtures.
  • Materials of construction compatible with the widest range of gases including stainless steel fluid components, hastelloy trim regulators, kalrez check valves, and kel-F valve and regulator seats.
  • 3/8” outlet lines and a spare regulator kit to accommodate high flow and sub-atmospheric gas delivery.
  • An integrated Class I Division II PLC Controller with Z-Purge for installation in hazardous locations, featuring an intuitive 12”color touchscreen. The system also utilizes Ethernet communications for local and remote system monitoring and data collection.
  • A multi-zone controlled heating system for maintaining desired flowrates and pressures, including manifold heat trace and variously sized cylinder heating blankets, accommodating both large and small gas cylinders.
  • A separate purge chamber, with an independent purge manifold and purifier, for removing process impurities, such as moisture and oxygen. High and low pressure access ports are also included for testing cylinder connections during cylinder changes at bottle pressure with an inert gas.
  • Filter/Purifier spool pieces built into the process line for future addition.
  • Adaptable cylinder connections with a 24-piece DISS/CGA cylinder connection kit and interchangeable process pigtails to ensure proper fit-up with a wide range of cylinder types.
  • A separate bubbler chamber with regulated bubbler manifold, liquid level sensors, a liquid containment pan, as well as cylinder scales and shelves for safe delivery and monitoring of liquefied gases in vapor phase.
  • UV/IR flame detectors in the process chambers for additional safety monitoring.

“Our goal with the Xturion™ Adaptable Source System was to give researchers the gas delivery flexibility they need to innovate faster and more efficiently,” said Jim Murphy, General Manager of Applied Energy Systems. “Through the skill of our expert engineering team, we were able to custom-develop an adaptable system that meets SEMI-GAS®’ recognized standards for performance, quality, and most importantly, safety—no matter the type of gas or flow rate it is configured to deliver. Now experienced gas handling operators have a high-end solution that evolves with their demands AND eliminates the need for multiple, costly source systems usually required to support a diverse range of processes and application needs.”

SEMI-GAS® supplies ultra high purity gas source systems, distribution systems and control technology to leaders in the Semiconductor industry, as well as customers in related industries that seek world-class designs for safety, quality and performance. SEMI-GAS® gas handling systems and equipment are engineered to support manufacturing of the most advanced electronic devices, delivering the highest process purity to improve product performance and reduce overall costs. As the first supplier of micro-processor based automated gas source systems, SEMI-GAS® brings 35 years of gas distribution systems innovation to its customers—and boasts one of the largest installed bases of gas handling equipment today. For more information on SEMI-GAS®, visit

SEMI-GAS® is a division of Applied Energy Systems, Inc., which designs, manufactures, and installs ultra high purity gas delivery systems in addition to providing precision welding services and field services for high purity piping installations, testing and technical consulting.

Media Contact:
Megan Kasper
Applied Energy Systems