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May 29, 2015

SEMI-GAS® Introduces Latest Xturion™ Rax™ Rack Mount System Customized for Bulk Silane Gas Delivery in High Volume Production Processes

System Outfitted with Additional Silane Safety Features and Heating Elements to Uphold Industry Standards for Outdoor Installations; Just One of Many Rax™ Configurations Available

MALVERN, PA, May 29, 2015 – SEMI-GAS®, the industry-leading line of ultra high purity gas source and distribution systems with robust control technology, recently unveiled the newest custom configuration in its line of Xturion™ Rax™ Rack Mount Systems, tailored for bulk silane delivery. Integrating features from SEMI-GAS®’ premier Megaturion™ bulk source systems , this rack system can accommodate larger tonner cylinders used for high volume production processes. It is also equipped with additional features to support stringent safety codes specific to silane storage and handling, including standards that require the system to be installed outdoors. As such, heating control elements have been added to the Bulk Silane Rax™ to manage gas temperature consistency during environmental weather fluctuations.

Just as this particular Rax™ configuration was custom-engineered to support the distinct delivery needs of a uniquely characterized gas in bulk volumes, SEMI-GAS®’ rack systems can be tailored to meet the demands of virtually any operational requirement, whether dealing with hazardous or inert gases, and standard or bulk cylinder sizes. In addition to enabling operators to save money on facility exhaust expenses when installed outdoors or in a gas bunker, Xturion™ Rax™ also provides the flexibility to be used as a free-standing alternative to wall mount systems when a facility is constrained by space or has unique wall penetration requirements.

Specific features of the Bulk Silane Rax™ System include:

  • Capacity for two high volume silane (SiH4) cylinders, with overall rack dimensions measuring 96″H x 54″W x 26″D.
  • A fully automatic bulk gas source manifold with automatic switchover, with flow capability rated for 200 SLPM at delivery pressure of up to 100 psig.
  • A PLC-based dual source controller and a 2-zone process gas heater controller, which can be mounted remotely from the rack system indoors.

All Xturion™ Rax™ rack systems are:

  • Equipped to perform purging and cylinder switchover automatically, and include state-of-the-art color touchscreen controllers for intuitive operating control.
  • Configurable for standard or bulk gas delivery, and can securely hold up to 4 standard cylinders with protective frame extensions.
  • Available in manual, semi-automatic, and fully automatic designs, and are able to support multiple communications protocols.

“Leveraging the talent of our expert engineering team, we are able to design applied solutions that are as unique as our customers’ process requirements,” said Jim Murphy, General Manager of Applied Energy Systems. “By combining our specialized custom capabilities with the premier features and functionality already inherent in our standard line of SEMI-GAS® products, we are able to tailor our systems to uphold specific performance and regulatory demands. Our latest Rax™ hybrid solution integrates the best of Xturion™ engineering with the proven bulk capabilities of our Megaturion™ line, and is a prime example of SEMI-GAS®’ ongoing innovation to solve unique customer challenges.”

SEMI-GAS® supplies ultra high purity gas source systems, distribution systems and control technology to leaders in the Semiconductor industry, as well as customers in related industries that seek world-class designs for safety, quality and performance. SEMI-GAS® gas handling systems and equipment are engineered to support manufacturing of the most advanced electronic devices, delivering the highest process purity to improve product performance and reduce overall costs. As the first supplier of micro-processor based automated gas source systems, SEMI-GAS® brings 35 years of gas distribution systems innovation to its customers—and boasts one of the largest installed bases of gas handling equipment today. For more information on SEMI-GAS®, visit
SEMI-GAS® is a division of Applied Energy Systems, Inc., which designs, manufactures, and installs ultra high purity gas delivery systems in addition to providing precision welding services and field services for high purity piping installations, testing and technical consulting.

Media Contact:
Megan Kasper
Applied Energy Systems