Press Releases

« back to Press Releases

October 28, 2014

SEMI-GAS® Systems Offers New Mini Gas Enclosure Model for Sub-Atmospheric Gas Delivery

MGE-XV increases safety in electronics manufacturing environments

Malvern, Pa. October 2014 – SEMI-GAS® Systems, an industry-leading supplier of ultra-high purity gas source and distribution systems, now offers the Xturion™ MGE-XV™, a new custom mini gas enclosure model that stores and delivers hazardous gases at sub-atmospheric pressures from small process cylinders. The MGE-XV increases operator safety and significantly reduces the risk of large, rapid gas cylinder leaks by drawing very low pressure gases from a vacuum in the process tool.

The MGE-XV harbors two separate steel compartments, each containing a sub-atmospheric gas delivery manifold, which feed two completely independent gas processes in one consolidated package.

Jim Murphy, division manager of SEMI-GAS Systems said, “At SEMI-GAS, safety is always our number one priority. We continuously strive to design systems that minimize risks involved with the handling of hazardous production materials. By developing the new MGE-XV system for delivering sub-atmospheric gases, we are significantly reducing the odds of a potential gas leak for our electronics manufacturers and ion implant gas users.”

MGE-XV utilizes a SEMI-GAS GigaGuard™ GSM controller to continuously monitor system delivery pressures and user-specified alarms. The controller’s proprietary software makes cylinder changes, purging sequences, and system monitoring seamless on the 4.3” color touch screen. Should a process deviate from normal operation an automatic shutdown will occur and visual and audible signals will commence to signify a change in status to the operator.

All MGE-XV systems are custom engineered to meet each customer’s application, operational preferences, and process specifications. To further provide a flexible, precisely tailored fit-up, each unit comes equipped with adjustable steel shelves and cylinder straps as well as adjustable exhaust ducts. Reinforced mounting holes are included for wall installations, and a welded steel rack option is also available to accommodate any free-standing facility requirements.

All MGE-X systems include an 11 gauge steel enclosure and meet uniform fire code requirements. Self-closing and lockable doors and windows, as well as a UL-approved fire sprinkler and ¼” safety glass windows are standard MGE safety containment features for handling hazardous production materials.

As with all SEMI-GAS ultra-high purity gas systems, the internal manifold components are orbitally welded, helium leak tested, and certified to meet the highest industry standards and all valves, regulators, gauges, tubing and fitting bodies are 316L stainless steel to resist breakdown from any corrosive chemicals.

Reader Service Inquiries: Megan Kasper; Applied Energy Systems; 180 Quaker Lane, Malvern, Pa. 19355;; 610-647-8744.

ABOUT APPLIED ENERGY SYSTEMS: Applied Energy Systems, Inc. designs, manufactures, and installs high purity gas delivery systems, as well as provides precision welding services, high purity piping installations and field services for the semiconductor, pharmaceutical, biotechnology, aerospace, university, government and research and development markets. Applied Energy Systems’ industry-leading SEMI-GAS® Systems division specializes in the manufacture of ultra-high purity gas source and distribution systems, including Centurion™ gas cabinets and gas panels, Nanoturion™ valve manifold boxes, Megaturion™ bulk specialty gas systems, and Xturion™ custom gas equipment.