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September 20, 2013

SEMI-GAS® Systems Xturion™ VaporX™ Delivers Low Vapor Pressure Liquefied Gases

Source system features integrated heating and control

Malvern, Pa. September 2013 – SEMI-GAS® Systems, a provider of industry-leading ultra-high purity gas source and distribution systems, introduces a new Xturion™ custom gas source system that safely and continuously delivers low vapor pressure liquefied process gases in vapor phase. VaporX™ is suitable for hazardous and non-hazardous gas applications and is designed to accommodate many of the low vapor pressure gases used in semiconductor, LED and solar cell production as well as in research and development and other high purity markets.

Xturion VaporX systems are available in one and two process cylinder models, each featuring a GigaGuard™ PLC controller and an ergonomically positioned 8” touch screen. The unit’s intuitive display schematics enable easy control over all the system’s operations including gas delivery, system alarms, automatic cylinder switchover and auto-purge capabilities.

The GigaGuard controller automatically interrupts gas flow and initiates a shutdown in the event of a sensor alarm trip, while an Emergency Shutoff (EMO) button offers immediate manual operator shutdown. LED lights display the systems’ status, while an audible alarm accompanies flashing lights alerting the operator should a hazardous condition occur. Each system is CE certified and is manufactured with ultra-high purity components to guarantee long term, reliable and consistent service. The system features pneumatically operated valves, Magnehelic® and pressure switch exhaust monitoring as well as an optional point-of-use mass flow controller box with heated low vapor pressure mass flow controllers.

To guard against undesirable process gas liquefaction and to help sustain the system’s cylinder temperatures and flowrates, VaporX is designed with an integrated fully automatic multi-zone heat control package which includes process gas cylinder heating blankets, gas manifold heat tracing, and process gas line heat tracing. All heat zones are independently controlled and employ redundant temperature measurement with over-temperature protection.

The standard two cylinder (2CE) model is 86” tall, 33” wide and 23” deep, including the external side-mounted heater controller enclosure. Various safety features come standard, such as a UL-approved fire sprinkler, a 1/4″ thick safety glass window, a self-closing, self-latching door, and a stainless steel cylinder scale. Heavy cast aluminum cylinder brackets and adjustable cylinder shelves ensure safe and secure gas cylinder fit-up.

“We are pleased to be able to continuously offer new versatile Xturion custom gas equipment solutions,” said Todd Bell, SEMI-GAS Systems’ engineering director and VaporX’s system designer. “Our customers work in a variety of industries with various gas requirements so we’ve created VaporX specifically for our customers who require delivery of low vapor pressure process gases. As with all our Xturion systems, VaporX is engineered to be flexible, offering many additional mechanical, electrical and enclosure features to meet each customer’s exact needs. We constantly strive to provide our customers with top quality customized products they have come to trust from SEMI-GAS Systems.”

Reader Service Inquiries: Megan Kasper; Applied Energy Systems; 180 Quaker Lane, Malvern, Pa. 19355;; 610-647-8744.

Applied Energy Systems, Inc. designs, manufactures and installs high purity gas delivery systems. The company also provides precision welding services, high purity piping installations and field services for the semiconductor, pharmaceutical, biotechnology, aerospace, university, government and research and development markets. Applied Energy Systems’ industry-leading SEMI-GAS® Systems division specializes in the manufacture of ultra-high purity gas source and distribution systems, including Centurion™ gas cabinets and gas panels, Nanoturion™ valve manifold boxes, Megaturion™ bulk specialty gas systems, and Xturion™ custom gas equipment.